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以钛酸丁酯和无水乙醇分别为原料和溶剂,添加适量稳定剂制成稳定溶胶,用浸涂法在Al2O3 基片上制备TiO2 薄膜,经1000℃H2 气氛下还原制得TiO2- x薄膜.最后在氯铂酸甲醛溶液中浸泡得到掺铂薄膜.实验结果表明掺铂薄膜在800℃下具有良好的氧敏感性和重复性,薄膜在N2 气氛下具有良好的电阻温度特性.本文分析了铂在薄膜中的作用原理.
Titanium tetrabutoxide and anhydrous ethanol were used as raw materials and solvent, respectively, and proper amount of stabilizer was added to prepare a stable sol. TiO2 film was prepared on Al2O3 substrate by dip coating method and TiO2-x film was prepared by reduction under H2 atmosphere at 1000 ℃. Finally, chloroplatinic acid formaldehyde solution was immersed in a platinum-doped film. The experimental results show that the Pt film has good oxygen sensitivity and repeatability at 800 ℃. The film has good resistance-temperature characteristics under N2 atmosphere. This paper analyzes the principle of platinum in the film.