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介绍了阴极真空弧沉积中，弧源在阴极接地和阳极接地2种不同工作状态下的工作特性．发现阳极接地时，因沉积靶室入口法兰的第二阳极作用，聚焦磁场对孤源放电稳定性的影响不如阴极接地时明显．因此可以加较高的聚焦磁场，从而获得电流较大和较稳定的沉积离子束．
The operating characteristics of arc source in two different working states of cathode grounding and anode grounding are introduced in the cathodic vacuum arc deposition. When the anode is grounded, the effect of the focusing magnetic field on the stability of the solitary discharge is not as pronounced when the cathode is grounded because of the second anode effect of the inlet flange of the target chamber. Therefore, a higher focusing magnetic field can be added to obtain a larger current and a more stable deposition ion beam.