论文部分内容阅读
在带微桥结构的石英玻璃基底上设计了一种新型Al-LiTaO3-ITO红外探测结构。在响应/参考双单元结构框架下,由振动、环境温度变化和日照变化引起的无效信号输出在前置放大电路处被消除掉了。用醋酸锂和乙醇钽作为起始反应物,通过溶胶凝胶工艺生成了对红外敏感的钽酸锂薄膜,并详细讨论了基于钽酸锂薄膜的红外探测器件制备工艺。用ITO衬底作下电极,蒸镀的Al点作上电极,在室温条件下测试了薄膜的介电特性,在1kHz处,介电常数为53.28,在40~10kHz内,介电损耗和介电系数呈下降趋势。器件的电压响应和比探测率测试结果表明75Hz处得到响应电压峰值9685V/W,器件的比探测率在70~100Hz区域保持在6.12×108cmHz1/2W-1附近。
A novel Al-LiTaO3-ITO infrared detector was designed on a quartz glass substrate with micro-bridge structure. Under the framework of the response / reference dual cell structure, the invalid signal output due to vibration, ambient temperature changes and sunshine variations is eliminated at the preamplifier circuit. Using lithium acetate and tantalum ethoxide as starting reactants, an infrared sensitive lithium tantalate film was formed by sol-gel process. The preparation of infrared detector based on lithium tantalate thin film was discussed in detail. The ITO substrate was used as the bottom electrode and the evaporated Al was used as the top electrode. The dielectric properties of the films were tested at room temperature. The dielectric constant was 53.28 at 1kHz, The electrical coefficient shows a downward trend. The device’s voltage response and ratio detection results show that the response voltage peak is 9685V / W at 75Hz, and the device’s ratio detection rate is maintained at around 6.12 × 108cmHz1 / 2W-1 in the region of 70-100Hz.