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用改进了的射频溅射仪,对InGaAsP/InP DH面发光管窗口沉积Al_2O_3抗反射层,以提高光功率的输出。本文采用了两种涂层途径,其一是对单个发光管窗口直接涂层,另一则是对发光管管芯片上窗口涂层,并对二者作了比较。
An improved RF sputter was used to deposit Al 2 O 3 anti-reflection layer on the window of InGaAsP / InP DH LED to improve the optical power output. Two kinds of coating approaches are adopted in this paper. One is to directly coat the window of a single LED, the other is to coat the window on the LED chip and compare the two.