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在分析简振梁模型的基础上设计了一种硅微谐振器,探讨了硅的表面加工技术在制作三维零部件中的应用,利用这种技术成功地制作了硅微谐振器的单晶硅谐振梁。
Based on the analysis of the model of the simple vibration beam, a silicon microresonator was designed. The application of silicon surface processing technology in the manufacture of three-dimensional components was discussed. The silicon microresonator .