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基于旋转补偿器的反射差分光谱(RC-RDS)技术是具有亚单层光学灵敏度的高精度表面表征方法,其全光谱快速测量性能,特别适合在线检测。为满足真空在线测量的应用需求,综合考虑使用空间、工作距离、光束直径、光谱宽度和通光率等限制因素,提出了基于离轴抛物(OAP)反射镜的光学测头设计方案,构建的测试样机实现了有效工作距离大于50cm、光斑直径小于6.5mm和光谱范围涵盖280~825nm等性能。实验研究了超高真空环境Cu(110)样品在退火处理中的RDS,仪器详细记录了信号随温度的演变过程,测量精度优于3×10-4,表明新方案满足真空环境下表面高灵敏光学测试的需求。
Reflected differential spectroscopy (RC-RDS) based on the rotational compensator is a high-precision surface characterization method with sub-monolayer optical sensitivity. Its full-spectrum fast measurement performance is especially suitable for on-line detection. In order to meet the application requirements of vacuum on-line measurement, an optical probe design scheme based on off-axis parabolic (OAP) mirror was proposed considering the constraints such as working space, working distance, beam diameter, spectral width and light transmittance. Test prototype to achieve an effective working distance greater than 50cm, spot diameter less than 6.5mm and spectral range covers 280 ~ 825nm and other properties. The RDS of the Cu (110) sample in the ultra-high vacuum environment during annealing was experimentally studied. The evolution of the signal with temperature was recorded in detail. The measurement accuracy was better than 3 × 10-4, indicating that the new scheme could meet the requirement of high sensitivity Optical testing needs.