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“PW—Ⅱ型光波导测试仪”是我国首次研制成功的测量厚膜参数的新型精密仪器。文章介绍了该仪器的测量原理和结构特点。对仪器的测量精度进行了理论分析和数学推导,并采取了相应的技术措施,给出了精确的实测计算结果:薄膜折射率测量精度的绝对值≤1×10~(-4);薄膜厚度测量精度的绝对值≤1×10~(-2)μm。该仪器还可以用来精确测量薄膜的损耗,并能用于各向异性薄膜特性参数的测试与研究。
“PW-Ⅱ-type optical waveguide tester” is the first time in China successfully developed the measurement of thick film parameters of the new precision instruments. The paper introduces the measuring principle and structural characteristics of the instrument. The measurement accuracy of the instrument has been theoretically analyzed and mathematically deduced. The corresponding technical measures have been taken and accurate measurement results have been obtained: the absolute value of film refractive index measurement accuracy is less than or equal to 1 × 10 -4; the film thickness The absolute value of measurement accuracy ≤ 1 × 10 ~ (-2) μm. The instrument can also be used to accurately measure the film loss, and can be used for anisotropic film characteristics of the parameters of the test and research.