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本文研究了 Ti O2 和 Si O2 溶胶 -凝胶光学膜在低温热处理下的组分、形貌特征、光散射特性 .AES分析结果表明 ,在 Ti O2 膜和 Si O2 膜的交界面处 ,Ti和 Si相互扩散 ,从而证实了在多层膜中 ,膜层之间、膜层和基底之间有Ti-O-Si(或Si-O-Ti,或Si-O-Si)化学键形成 .AES和 ESCA分析结果显示溶胶 -凝胶膜经过低温处理后 C的含量较高 ,这归结为溶胶—凝胶膜的工艺特点 .AFM测试结果显示 ,溶胶—凝胶 Ti O2 光学膜的表面形貌具有显著的柱状结构 ,薄膜表面起伏大约是 7.5 nm.Ti O2 ,Si O2 单层膜的表面散射率随着热处理温度的提高而变大 ,对于不同陈化时间的溶液镀制的膜有不同的表面散率 .
In this paper, the composition, morphology and light scattering properties of Ti O2 and Si O2 sol-gel films under low temperature heat treatment were investigated. The results of AES analysis showed that at the interface of Ti O2 film and Si O2 film, Ti and Si interdiffusion, confirming the formation of chemical bonds of Ti-O-Si (or Si-O-Ti, or Si-O-Si) between the layers and between the layers and the substrate in the multilayer film. ESCA results show that the content of C in the sol-gel film after low temperature treatment is high, which is attributed to the process characteristics of the sol-gel film.The AFM test results show that the surface morphology of the sol-gel Ti O2 optical film is significant Of the columnar structure, the surface of the film is about 7.5 nm in undulation, the surface diffusion coefficient of the Si02 single layer film increases with the increase of the heat treatment temperature, and different surface dispersions are obtained for the films with different aging times Rate.