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一前言电阻应变片(计)广泛应用于应变测量和压力传感器与加速度传感器等方面。20世纪60年代以前,测量应变都是使用金属丝式或箔式应变片。60年代发展了半导体体型应变片,提高了灵敏度。60年代后期,又发展了Si扩散工艺的应变计传感器,克服了半导体体型应变计稳定性差、一致性不好,难以小型化等缺点。丝箔式及半导体体型应变计已在国内广泛使用,而Si扩散应变计传感器也已有许多单位研制生产,正在逐步推广使用。本文所介绍的薄膜式应变计,是一种在60年代才为人所注意,70年代才走向实用阶段的新型应变计,近2—3年国外已开始有最优越的高稳定性能的产品问世。
A preface Resistance strain gauges (meters) are widely used in strain measurement and pressure sensors and acceleration sensors. Before the 1960s, strain gauges were used to measure the strain using wire or foil strain gauges. The 1960s developed the semiconductor body strain gauge, increased sensitivity. The late 1960s, but also the development of Si diffusion process strain gauge sensor to overcome the semiconductor body type strain gauge poor stability, consistency is not good, difficult to miniaturization and other shortcomings. Wire foil and semiconductor body strain gauge has been widely used in China, and Si diffusion strain gauge sensor has also been developed by many units, is being gradually promoted. The film type strain gauge introduced in this paper is a kind of novel strain gauge which was noticed in the 1960s and only reached the practical stage in the 1970s. The most advanced high-stability products in foreign countries have started to emerge in the recent 2-3 years.