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压力是流体的状态量之一,压力计量对于了解流体状态非常重要,它是以石油工业为中心的工艺过程控制领域中不可缺少的。此外,最近也开始出现把压力传感器用于日常生活使用的机器上以提高它们性能的发展趋势。 一般来说是先把压力变换成力、变位和变形等其他物理量。然后,将和这些物理量的大小成比例变化的电阻和静电容量变换成电信号。利用电阻变化的压力传感器中有一种利用半导体的压力——电阻变化的压力传感器是采用IC制造技术制成。由于采用了硅微细加工技术,因而能将应变电阻和感受压力的膜片做成一个整体。
Pressure is one of the fluid’s state variables. Pressure measurement is very important for understanding the state of the fluid. It is indispensable in the process control of the oil industry. In addition, the trend of using pressure sensors for machines used in daily life to enhance their performance has also recently begun. In general, pressure is first transformed into force, displacement and deformation and other physical quantities. Then, the resistance and the capacitance, which vary in proportion to the sizes of these physical quantities, are converted into electrical signals. Among the pressure sensors that use resistance change, there is a pressure sensor that makes use of the pressure-resistance change of the semiconductor by using IC manufacturing technology. As a result of silicon micro-processing technology, which can strain resistance and feel the pressure of the diaphragm made of a whole.