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在国外,质谱技术相当普遍地用于等离子体的研究。但由于等离子体反应过程的机理复杂,准确地测定等离子体的组份及其反应变化,是很值得研究的问题。本文讨论了等离子体质谱分析技术的特点,提出了一些直接从等离子体中取样分析、减少光电流、高速电子流及离子流的干扰,提高分析灵敏度和分辨本领的有效方法。
Abroad, mass spectrometry technology is quite common for plasma research. However, due to the complex mechanism of the plasma reaction process, accurate determination of plasma components and their reaction changes are worth studying. In this paper, the characteristics of plasma mass spectrometry (GC-MS) are discussed. Some effective methods of sampling analysis directly from plasma to reduce the interference of photocurrent, high-speed electron current and ion current and improve the analytical sensitivity and resolution are proposed.