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在对磁场作用下磁性液体薄膜微形变的影响因素进行分析的基础上,设计了一套磁性液体薄膜微形变测试装置,利用永磁体与电磁线圈相结合作为磁源实现了矩阵磁场的微型化和形变所需梯度,借助摄像装置观测记录磁性液体薄膜微形变的实时图形。通过ANSYS软件仿真分析确定了矩阵磁场的最佳磁源距离,实验研究了矩阵磁场的磁极布置方式、磁性液体的量对其薄膜微形变图形的影响。实验结果表明:对于4×4的矩阵磁场,当磁源相距3.5~4mm、磁极同侧相邻同极布置、磁性液体体积为0.6mL时,磁性液体薄膜的微形变凸起高度达到最大,凸起点大小均匀,形状圆润,形变效果最好。测试结果验证了磁性液体薄膜微形变的磁场可控性,为微镜阵列的致动方式提供了一个新的研究方向。
Based on the analysis of the influencing factors of the micro-deformation of the magnetic thin film under the action of magnetic field, a set of magnetic liquid film micro-deformation testing device is designed. By combining the permanent magnet and the electromagnetic coil as the magnetic source, Deformation required gradient, with the aid of a camera device to record real-time graphics micro-deformation of the magnetic liquid film. The optimal magnetic source distance of the matrix magnetic field was determined through ANSYS software simulation. The magnetic pole arrangement and the amount of magnetic liquid on the micro-deformation of the film were experimentally studied. The experimental results show that for the 4 × 4 matrix magnetic field, when the magnetic sources are 3.5-4 mm apart, the same side of the magnetic pole is adjacent to the same pole and the volume of the magnetic liquid is 0.6 mL, the height of the micro-deformation protrusion of the magnetic liquid film reaches the maximum. Start uniform size, rounded shape, deformation of the best. The test results verify the magnetic field controllability of the micro-deformation of the magnetic liquid film and provide a new research direction for the micro-mirror array actuation.