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为了满足立式辊磨机磨盘与磨辊间的位移监测需求,设计了一种新型的可进行温度补偿并能提高测量精度的非接触式磁耦合光纤Bragg光栅(FBG)位移传感器,完成了相关理论分析和标定实验。测试结果表明:本文传感器的量程范围是1~12mm,位移测量分辨率为1μm,重复性误差为2.6%,回程误差为0.98%FS。未进行温度补偿前,温度对位移的影响为28.10pm/℃;温度补偿后,温度对位移的影响为0.88pm/℃。本文研制的传感器可用于工程中非接触条件下的位移测量。
In order to meet the requirement of displacement monitoring between the vertical roller mill and the roller, a new type of non-contact magnetic coupling fiber Bragg grating (FBG) displacement sensor which can compensate the temperature and improve the measuring accuracy was designed and completed. Theoretical analysis and calibration experiment. The test results show that the range of this sensor is 1 ~ 12mm, the displacement measurement resolution is 1μm, the repeatability error is 2.6% and the return error is 0.98% FS. Before temperature compensation, the effect of temperature on displacement is 28.10pm / ℃. After temperature compensation, the influence of temperature on displacement is 0.88pm / ℃. The sensor developed in this paper can be used to measure the displacement under non-contact conditions in engineering.