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随着四极质谱计的广泛应用,人们对四极质谱计定最测最的要求日益迫切。但是,由于这种仪器质量歧视效应比较显著,边缘场、污染对离子谱和灵敏度影响比较大,这就给四极质谱计定量分析带来很大困难。尤其在真空测量中,为了进行分压强测量,不仅需要制定各种气体的离子谱,而且还必需对质谱计进行各种气体的灵敏度的绝对校准。
With the wide application of quadrupole mass spectrometers, the most stringent requirements for quadrupole mass spectrometry have become increasingly urgent. However, due to the obvious quality discrimination effect of this instrument, fringe field and pollution have a great influence on the ion spectrum and sensitivity, which brings great difficulties to quantitative analysis of quadrupole mass spectrometer. Especially in vacuum measurement, in order to perform partial pressure measurement, not only the ion spectra of various gases need to be established, but also the absolute calibration of the sensitivity of various gases must be performed on the mass spectrometer.