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The main challenge of the application of L10FePt thin films as magnetic recording media is the simultaneous fabrication of FePt (001) thin films with high perpendicular anisotropy and small grain size.L10FePt (001) granular films with grain size of 5-6 nm were achieved on MgOunderlayer by doping C and Ag.1-3 However,RF sputtering of the insulating MgOunderlayer layer is not preferred for industrial applications due to its low deposition rate and particle contamination on the media surface.