The influence of laser conditioning on defects of HfO2 monolayer films prepared by electron beam evaporation (EBE) is in......

采用小光斑激光预处理扫描SiO2单层膜，利用激光损伤阈值的光斑效应对预处理前后SiO2单层膜中缺陷的影响进行分析，并引入缺陷阈值和缺......