介绍和表征了一种制作聚二甲基硅氧烷(PDMS)软模板的工艺方法,并实现了非平面微加工工艺的图形转移。首先采用深硅电感耦合等离子......

A kind of PH gradient microfluidic chips through soft-lithography microfabrication for isoelectric focusing (IEF) and hi......