MT-CVD相关论文
A Study on Medium Temperature Chemical Vapor Deposition (MT-CVD) Technology and Super Coating Materi
In this paper, the dense and columnar crystalline TiCN coating layers with very good bonding strength between a layer an......
采用MT-CVD工艺技术,用CH3CN等含有C/N原子团的有机化合物,在700~900℃沉积组织致密、层间结合强度好、柱状结晶的超级TiCN涂层.研......
MT┐CVD氮碳化钛涂层新工艺机械部成都工具研究所(610056)陈旭MT-CVD(中温化学气相沉积)氮碳化钛涂层工艺是瑞士Bernex公司在CVD涂层工艺上的一系列创新成果之一,已......

