为了研究高频电容式超声换能器(CMUT)的性能,设计了谐振频率为10 MHz的CMUT并进行了有限元仿真分析.首先简述了CMUT的工作原理和基......

本文提出了一种紧凑的可动浮栅型电容式超声传感器(Capacitive Micromachined Ultrasonic Transducer,CMUT)器件结构和低噪声高频......

Although many modeling approaches exist for analyzing the behavior of capacitive micro-machined ultrasonic transducers(C......