Since novel optoelectronic devices based on the peculiar behaviors of the tunneling probability, e.g., resonant tunneling devices (RTD) and band-pass filter, are steadily proposed, the analytic transfer matrix (ATM) method is extended to study these devices. For several examples, we explore the effect of the scattered subwaves on tunneling; it is shown that the resonant or band-pass structures in tunneling probability are determined by the phase shift results from the scattered subwaves. Since novel optoelectronic devices based on the peculiar behaviors of the tunneling probability, eg, resonant tunneling devices (RTD) and band-pass filter, are steadily proposed, the analytic transfer matrix (ATM) method is extended to study these devices. , we explore the effect of the scattered subwaves on tunneling; it is shown that the resonant or band-pass structures in tunneling probability are determined by the phase shift results from the scattered subwaves.