A strategy to prepare horizontally aligned single-walled carbon nanotubes(SWNTs) at moderate temperatures(≤600 ℃) were developed.Using ferocene as the catalyst precursor,Fe nanoparticles are formed in the gaseous phase and catalyze the nucleation and growth of SWNTs in situ.Then the resultant SWNTs are deposited onto the substrates downstream and aligned by the surface lattice of the ST-cut single crystal quartz.The preparation of SWNT arrays at moderate temperatures is important for combining the tube growth with device fabrication. A strategy to prepare horizontally aligned single-walled carbon nanotubes (SWNTs) at moderate temperatures (≤600 ° C) were developed. Using ferocene as the catalyst precursor, Fe nanoparticles are formed in the gaseous phase and catalyzed the nucleation and growth of SWNTs in situ .Then the resultant SWNTs are deposited onto the substrates downstream and aligned by the surface lattice of the ST-cut single crystal quartz. The preparation of SWNT arrays at moderate temperatures is important for combining the tube growth with device fabrication.