理论和实验上研究了Xe介质毛细管放电极紫外光源等离子体时间特性和最佳条件.从理论上建立了Xe介质一维辐射磁流体力学模型,模拟了不同气压和电流条件下等离子体压缩和辐射特性;实验上测量了放电电流30 kA时不同气压条件下13.5 nm(2%带宽)动态特性.理论和实验结果表明:不同放电电流条件下,存在最佳气压值,最佳气压随着电流的增加而增加;同时,电流增加时,13.5 nm(2%带宽)辐射光强峰值时刻减小. Theoretical and experimental studies on the time characteristics and the optimum conditions of the Xe medium capillary discharge EUV plasma have been carried out theoretically and theoretically.The one-dimensional X-ray EMR model has been established theoretically and the plasma compression and radiation under different pressure and current conditions have been simulated The experimental results show that the optimal pressure at different discharging conditions is at 13.5 nm (2% bandwidth) under different pressure conditions at 30 kA discharge current, Increase at the same time, the current increases, 13.5 nm (2% bandwidth) radiation intensity peak time decreases.