等离子体化学发展二十多年来,在化学的许多领域里取得了重大进展。由于等离子体化学反应有许多优于普通化学反应的特点,所以引起了化学界的普遍重视。本文对低温等离子体在刻蚀和无机合成上的应用做一简略介绍。 For more than two decades of plasma chemistry, significant advances have been made in many areas of chemistry. Due to the many advantages of plasma chemical reactions over ordinary chemical reactions, it has attracted widespread attention in the field of chemistry. In this paper, the application of low temperature plasma in etching and inorganic synthesis is briefly introduced.