论文部分内容阅读
用离子束辅助沉积技术在ＧＣｒ１５钢基体上形成了ＴｉＣｘＮｙ膜．ＴＥＭ观察揭示，膜呈多晶结构，具有（１１１），（２００）和（２２０）择优取向．ＡＥＳ和ＸＰＳ分析进一步证实，ＴｉＣｘＮｙ膜呈含氧配置．膜的硬度和摩擦特性与Ｎ含量有关，Ｎ的过高含量对提高表面硬度不明显，但摩擦特性明显下降．在作者的实验条件下，以３×１０１７／ｃｍ２的注量为宜．干摩擦表明，膜的抗氧化性能优良．不仅存在能有效地抑制基体在摩擦过程中形成的氧化皮，又由于硬度高，润滑性良好，还能显著地改善基体的耐磨粒磨损特性．
TiCxNy films were formed on the GCr15 steel substrate by ion beam assisted deposition. TEM observation revealed that the films were polycrystalline with preferential orientation of (111), (200) and (220). AES and XPS analysis further confirmed that the TiCxNy film was in an oxygen-containing configuration. The hardness and friction characteristics of the film are related to the content of N. The excessive content of N is not obvious to improve the surface hardness, but the frictional properties are obviously decreased. In the author’s experimental conditions, to 3 × 1017 / cm2 flu is appropriate. Dry friction shows that the membrane has excellent oxidation resistance. Not only can effectively suppress the scale formed during the friction of the substrate, but also because of the high hardness, good lubricity, but also significantly improve the wear resistance of the substrate wear characteristics.