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基于聚合物材料的波导型电光器件对提升光通信网络的带宽容量具有重要的意义。设计并制备了一种基于有机/无机杂化非线性材料的准矩形聚合物电光波导,采用SiO2作为下包层,紫外胶SU-8作为引导芯层,掺有生色团DR1的有机/无机杂化非线性材料DR1/SiO2-TiO2作为电光层,通过优化感应耦合等离子体刻蚀工艺的天线功率、偏置功率和氧气流量,将SU-8同时作为引导芯层和刻蚀工艺的掩模,制备了准矩形电光波导。实验测得波导传输损耗为-3.5dB/cm。
Waveguide-type electro-optic devices based on polymer materials are of great significance for improving the bandwidth capacity of optical communication networks. A quasi-rectangular polymer electro-optical waveguide based on organic / inorganic hybrid nonlinear materials was designed and prepared using SiO2 as the undercladding and UV-curable SU-8 as the lead core. The organic / inorganic The hybrid non-linear material DR1 / SiO2-TiO2 is used as the electro-optic layer, and SU-8 is used as a mask to guide the core and the etching process by optimizing the antenna power, bias power and oxygen flow rate of the inductively coupled plasma etching process , A quasi-rectangular electro-optic waveguide was prepared. Experimentally measured waveguide transmission loss of -3.5dB / cm.