Akustica公司的设计师们称：AKU2000是首款CMOS MEMS直接数字输出、单芯片传声器。该公司从卡内基梅隆大学获得了该技术的使用许可(它相信此项技术得到了全面的专利保护),使其能够采用标准CMOS工艺的金属化层来制作MEMS,以形成构成传声器的传感元件的隔膜。由于该技 Akustica’s designers said: AKU2000 is the first CMOS MEMS direct digital output, single-chip microphones. The company has licensed the technology from Carnegie Mellon University, which it believes is fully patent protected, enabling it to manufacture MEMS using metallization layers of standard CMOS processes to form the microphones that make up the microphone Membrane of sensing element. Because of this technique