离子探针是在探针技术和质谱仪的基础上发展起来的较为新型的仪器。它可以分析所有固体且样品制备简单,检测灵敏度高(PPm—PPb 范围内),可进行薄表面层的分析、深度分析和微区分析。这些性能在许多科研和生产领域中是极为可贵和必不可少的。本文利用离子探针分析了各种形状的绝 Ion probes are relatively new instruments developed on the basis of probe technology and mass spectrometry. It analyzes all solids and provides simple sample preparation and high detection sensitivity (in the PPm-PPb range) for thin surface layer analysis, depth analysis and micro-area analysis. These properties are extremely valuable and essential in many areas of research and production. In this paper, ion probes were used to analyze various shapes