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本文提出了一种高抽速离子泵。这种离子泵就是把一种新型的冷阴极和普通离子泵结合起来,实验结果表明, 在压强低于10-4 Pa时,它的单位体积离子流是普通离子泵离子流的30倍。
This paper presents a high pumping speed ion pump. The ion pump combines a new type of cold cathode with an ordinary ion pump. The experimental results show that at a pressure of less than 10-4 Pa, its ion current per unit volume is 30 times that of an ordinary ion pump.