超精密加工是当代机械制造最重要的发展方向之一,是现代航空、航天、微电子等尖端技术发展的基础。在超精密加工中,很重要的一点就是要实现刀架微量进给以及零件的在线检测,为了将进给精度控制在0.5μm的范围内,用传统的进给机构很难胜任此项工作,因此,更加有效的微量进给系统的研制是超精加工中一个很重要的课题。压电陶瓷(PZT)是通过逆压电效应或电致伸缩效应来产生位移。由于PZT没有电流热效应问题,并且能实现精密的微量进给,因此正日益受到人们的重视, Ultra-precision machining is one of the most important development directions of contemporary machinery manufacturing, and is the basis of the development of cutting-edge technologies in modern aviation, aerospace and microelectronics. In the ultra-precision machining, it is very important to achieve the micro-feed turret and parts online testing, in order to feed accuracy control in the range of 0.5μm, with the traditional feeding mechanism is not competent for this work, Therefore, the development of a more effective micro-feeding system is a very important issue in superfinishing. Piezoelectric ceramics (PZT) produce displacement by inverse piezoelectric effect or electrostrictive effect. As PZT does not have current thermal effects and can achieve precise micro-feed, it is increasingly valued by people.