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本文主要介绍如何改造真空镀膜机,使它能应用于增透膜的制备.改造后的镀膜机己用于SiO增透膜的制备.将SiO增速膜蒸镀于发光管的发光面上,能使发光管的发光功率和入纤耦和功率有较大的提高.
This paper mainly introduces how to transform the vacuum coating machine so that it can be used in the preparation of the AR coating.The modified coating machine has been used in the preparation of the SiO AR coating.The SiO growth film is deposited on the light emitting surface of the arc tube, LED can make light-emitting power into the fiber coupling and power have greatly improved.