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目的是为实现高灵敏度、集成化的微麦克风和扬声器奠定基础。利用锆钛酸铅（ＰＺＴ）铁电体具有的优良的力电耦合特性，提出将ＰＺＴ铁电薄膜与硅工艺相结合，研制悬臂式铁电—硅集成微麦克风和扬声器。利用双膜片模型对ＰＺＴ振膜结构进行了优化设计，并对其工艺流水过程进行了初步设计，从而为集成微麦克风和扬声器的最终实现奠定了设计基础。铁电—硅集成微麦克风和扬声器可望应用于多媒体语音输入及移动通信等方面。
The goal is to lay the groundwork for high-sensitivity, integrated microphones and speakers. Based on the excellent electromechanical coupling properties of lead zirconate titanate (PZT) ferroelectrics, this paper proposes to combine the PZT ferroelectric thin film with the silicon process to develop a cantilever ferroelectric silicon integrated microphone and speaker. The double diaphragm model was used to optimize the structure of PZT diaphragm, and the preliminary design of its process flow was carried out, which laid the foundation for the final realization of integrated microphones and loudspeakers. Ferroelectric - silicon integrated microphones and speakers are expected to be used in multimedia voice input and mobile communications.