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介绍了厚膜电阻的压阻效应、厚膜力敏材料及传感器。描述了厚膜力敏材料及传感器的现状, 着重阐述了厚膜压力传感器和力传感器的结构和工艺特点, 并讨论了提高其性能的途径及其发展趋势。
The piezoresistive effect of thick film resistors, thick film force sensitive materials and sensors are introduced. The current situation of thick-film force-sensitive materials and sensors is described. The structure and process characteristics of thick-film pressure sensors and force sensors are emphatically described. The ways to improve their performance and their development trends are also discussed.