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由于传统的基于干涉原理的测量方法无法对用于太阳X射线成像仪的WolterI型旋转非球面反射镜进行检测,本文提出了一种在线检测此类反射镜面形的方法。以长程轮廓测量仪的原理为基础,经过改进、整合测量装置并在扫描机构中加入五角棱镜转折光路,搭建了一套WolterI型旋转非球面反射镜面形检测装置,并对该装置的工作原理、结构参数设定以及数据处理算法等进行了研究。用一块标准平面反射镜作为基准面对该装置定标,并通过实测反射镜样品进行验证实验。实验结果表明:该装置的倾斜度测量误差为RMS6.7μrad,重复精度为0.75μrad,轮廓测量精度约为PV0.24λ,RMS0.07λ,基本满足设计要求。
Since the traditional interferometric-based measurement method can not detect the WolterI rotating aspheric mirror used in the solar X-ray imager, a method of on-line detection of such mirror facets is proposed. Based on the principle of long-range profile measuring instrument, a set of WolterI rotary aspheric mirror surface shape detecting device was improved by integrating the measuring device and adding the pentagonal prism turning light path to the scanning mechanism. The working principle, Structure parameter setting and data processing algorithms were studied. The device was calibrated with a standard flat mirror as a reference plane and validated by a real mirror sample. The experimental results show that the error of the device is RMS6.7μrad, the repeatability is 0.75μrad, the accuracy of contour measurement is about PV0.24λ and RMS0.07λ, which basically meet the design requirements.