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本文详细地叙述了预真空残气质谱分析的设备和方法,并且提供了一系列目前常用的预真空获得方法的残气质谱图。通过对这些残气质谱的分析和比较,可以为清洁的超高真空系统选用一种合适的预真空获得方式。
This paper describes in detail the equipment and methods for pre-vacuum GCMS and provides a series of GCMs for the commonly used pre-vacuum acquisition methods. Through the analysis and comparison of these residual mass spectra, a suitable pre-vacuum acquisition method can be selected for the clean ultra-high vacuum system.