我们在一台制作第三代象增强器的超高真空系统中安装了俄歇（Ａｕｇｅｒ）能谱仪，以其对ＧａＡｓ光电阴极的制备过程进行在线监测分析，其中包括选择性腐蚀过程的俄歇观测，阴极激活前清洁措施的效果评价和Ｃｓ－Ｏ激活过程中Ａｓ／Ｇａ俄歇信号比对光电灵敏度的影响，Ｃｓ源纯度的分析及对光电发射的影响。根据分析结果，激活出了１０００μＡ／ｌｍ的反射式光电阴极和５００μＡ／ｌｍ的透射式光电阴极。 We installed an Auger spectrometer in an ultra-high vacuum system that made the third generation of image intensifier for on-line monitoring of the preparation of GaAs photocathodes, including the selective etching process in Russia Observations on the effect of clean-up before cathodic activation and on the sensitivity of As / Ga Auger signals to Cs-O activation, the analysis of Cs source purity, and their effect on photoemission. Based on the results of the analysis, a reflective photocathode of 1000 μA / lm and a transmissive photocathode of 500 μA / lm were activated.