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在10-3Pa的高真空环境下,利用355nm的紫外脉冲激光以低于石英基片零概率损伤阈值的能量密度对其进行重复多次的全口径扫描,目的是为了研究石英基片在接受不同剂量的紫外激光辐照后其抗损伤能力的变化和原因.通过辐照过程中损伤点的扩展程度以及辐照后的抗损伤测量表明,高真空环境下紫外脉冲激光辐照后的石英基片抗损伤能力明显降低,降低的幅度更多的与其接受激光辐照的次数有关,辐照能量密度的影响相对较小;通过荧光及X射线光电子能谱(XPS)检测发现,紫外脉冲激光辐照后石英基片表面氧缺位的增加是导致其抗损伤能力下降的主要原因,其程度也直接与接受辐照的紫外脉冲激光剂量相关.
In a high vacuum environment of 10-3Pa, a full-aperture scan was repeated with a 355 nm UV pulsed laser at energy densities below the zero-probability damage threshold of the quartz substrate for the purpose of investigating the effect of the quartz substrate on receiving different The changes of the anti-damage ability and the reason of UV laser irradiation were studied by measuring the extent of damage and the anti-damage after irradiation. The results show that the quartz substrate irradiated by ultraviolet pulsed laser in high vacuum environment The anti-damage capability was significantly reduced, and the reduction range was more related to the number of times of laser irradiation. The influence of irradiation energy density was relatively small. By fluorescence and X-ray photoelectron spectroscopy (XPS) The increase of oxygen vacancies on the surface of quartz substrate is the main reason for the decrease of anti-damage ability, which is also directly related to the dose of ultraviolet pulsed laser radiation.