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采用脉冲激光沉积(PLD)方法在不同衬底温度条件下制备了不含氢的类金刚石薄膜,在相对湿度为80%与5%的条件下测试了类金刚石薄膜的摩擦学特性.由于PLD方法的独特性,薄膜具“软-硬”双层结构,保证了薄膜在潮湿条件(RH=80%)下仍保持非常优异的摩擦性能,摩擦系数与磨损率最低达0.045与5.94×10-10mm3·N-1·m-1,相对于干燥条件下测试结果来看,几乎没有明显变化.原子力显微镜与白光干涉仪测试结果表明,薄膜的均方根粗糙度小于1nm,最小值为0.209nm;XPS表明薄膜sp3最高含量达72%,并且Raman光谱结果表明室温下制备的薄膜是非晶网络结构;纳米压痕迹测试表明,薄膜最高硬度与弹性模量分别达51GPa与350GPa,且随衬底温度升高而降低;样品表面的水接触角均大于90°,薄膜表面疏水并具有极低的表面能.
The diamond-like carbon films were prepared by pulsed laser deposition (PLD) at different substrate temperatures, and the tribological properties of diamond-like carbon films were tested under relative humidity of 80% and 5% The film has a “soft-hard” double-layer structure, which ensures that the film retains very excellent friction performance under wet conditions (RH = 80%) with the lowest coefficient of friction and wear rate of 0.045 and 5.94 × 10 -10mm3 · N-1 · m-1, compared with the results of the test under dry conditions, there is almost no significant change.Atomic force microscope and white light interferometer test results show that the film has a root mean square roughness of less than 1nm, a minimum of 0.209 nm; XPS showed that the maximum content of sp3 film reached 72%, and the results of Raman spectroscopy showed that the film prepared at room temperature was amorphous network structure; nanoindentation test showed that the maximum hardness and elastic modulus of the film reached 51GPa and 350GPa, The temperature increases and decreases; the water contact angle of the sample surface is greater than 90 °, the membrane surface is hydrophobic and has a very low surface energy.