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设计、模拟了一款用于多频振动的MEMS复合式能量采集器,提出了一种新颖的能量采集结构,即将压电式悬臂梁和可变电容器结合起来用于多频振动能量的采集。在建立多频振动能量采集系统分析模型的基础上,使用MatLab/SIMULINK的数值模拟,预测了功率输出。模拟结果显示,该结构可在630～655Hz有效工作,在负载为50 kΩ时,输出功率可达13.46μW。基于这个结果,给出了一个优化设计方案,同时为了防止结构失效,对结构进行了有限元仿真分析。仿真分析结果显示了良好的预期性能,说明了该设计指导思想的合理性和先进性。
A MEMS composite energy harvester for multi-frequency vibration is designed and simulated. A novel energy harvesting structure is proposed, which combines piezoelectric cantilever and variable capacitor for multi-frequency vibration energy acquisition. Based on the analysis model of multi-frequency vibration energy acquisition system, the numerical simulation of MatLab / SIMULINK is used to predict the power output. The simulation results show that the structure can work effectively at 630 ~ 655Hz, and the output power can reach 13.46μW when the load is 50kΩ. Based on this result, an optimized design scheme is given. At the same time, in order to prevent structural failure, finite element simulation analysis of the structure is carried out. Simulation results show good expected performance, indicating the rationality and advanced nature of the design guidelines.