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利用多弧离子镀设备,通过引入Cr和C元素对Ti Al Si N硬质涂层进行改性,制备出CrTiAlSiN和CrTiAlSiCN改性涂层。利用划痕仪、显维硬度计和球盘摩擦磨损机对3种涂层的结合强度和摩擦学性能进行对比研究。结果表明,改性后的CrTiAlSiN和CrTiAlSiCN涂层为Cr N和Ti(Al)N的复合结构涂层,C和Si元素以非晶化学态的形式存在。相比较于TiAlSiN涂层,CrTiAlSiN和CrTiAlSiCN涂层在保持较高结合强度的同时,硬度和摩擦系数均增加。
The multi-arc ion plating equipment was used to modify the TiAlSiN hard coatings by introducing Cr and C elements to prepare CrTiAlSiN and CrTiAlSiCN modified coatings. The binding strength and tribological properties of the three kinds of coatings were compared using a scratch tester, a dimension tester and a disc friction and wear tester. The results show that the modified CrTiAlSiN and CrTiAlSiCN coatings are composite coatings of Cr N and Ti (Al) N, and the C and Si elements exist as amorphous forms. Compared with TiAlSiN coating, CrTiAlSiN and CrTiAlSiCN coatings maintain higher bonding strength, while the hardness and friction coefficient increase.