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介绍 Sn In Cu 三种金属合金的氧化物薄膜的合成,对各种元素的含量做了分析,证明薄膜的透过率可以和 ITO 薄膜持平,对紫外线有较高透过率。指出了退火过程对透过率的影响.通过对元素能谱的测量,发现薄膜中元素含量与金属的比含量有关.对比了薄膜和衬底的元素含量,清楚了测量中出现的疑点。同时也给出了各种元素在膜中的分布情况、电导率与温度的关系.对材料的光学带隙与吸收系数的关系做了描述,对扩展态迁移率与迁移率边和费米能级之间的关系进行了讨论.
This paper introduces the synthesis of oxide film of Sn In Cu three kinds of metal alloys and analyzes the contents of various elements. It proves that the transmittance of the film can be flat with that of ITO film and has higher transmittance to ultraviolet light. The influence of the annealing process on the transmittance was pointed out.The elemental energy spectrum was measured and the content of element in the film was found to be related to the specific content of the metal.Compared with the elemental content of the film and the substrate, At the same time, the distribution of various elements in the film and the relationship between conductivity and temperature are also given.The relationship between the optical bandgap and the absorption coefficient of the material is described, and the relationship between extended state mobility and mobility and Fermi energy The relationship between the levels was discussed.