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通过比较实测与计算所得整体材料纳米压入加载曲线及Berkovich压头的面积函数，对已建立的Berkovich压头绝对钝化量的确定方法进行了实验验证在此基础上，测定了蒸发恢制在Si单晶上三种不同膜厚Al膜的屈服强度和硬化指数，并与拉伸分离法获得的结果进行了比较结果表明，利用纳米压入加载曲线确定陶瓷基体上金属薄膜基本力学性能的方法是可行的．
Through the comparison of measured and calculated nanoindentation load curves and the area function of Berkovich indenter, the method to determine the absolute passivation amount of Berkovich indenter has been experimentally verified. Based on this, the influence of evaporation on Si single crystal of three different thickness of the Al film yield strength and hardening index, and compared with the results obtained by the tensile separation method results show that the use of nano-pressure loading curve to determine the basic mechanical properties of the metal matrix on the ceramic substrate It works.