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机上在线面形检测方式有利于提高非球面的加工效率和精度。提出了一种基于光纤传感的在线面形检测方法,通过空气静压轴承探头和激光干涉位移计的有机融合构成检测系统。研究了面形误差数据处理方法,探讨了测量力与扫描速度对测量精度的影响。
On-line surface inspection method is conducive to improving the processing efficiency and accuracy of the aspheric surface. An on-line surface detection method based on optical fiber sensing was proposed. The detection system was composed of organic fusion of hydrostatic bearing probe and laser interferometer. The processing method of surface error data was studied, and the influence of measuring force and scanning speed on the measurement accuracy was discussed.