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设计并制作了带有集成透镜的1×4 InGaAs/InP pin探测器阵列.对器件纵向和横向结构参数及集成InP透镜几何参数进行了模拟设计与优化.器件带宽达1.0GHz,对宽带波分复用、光互连以及光计算网络有重要应用价值.
A 1 × 4 InGaAs / InP pin detector array with an integrated lens was designed and fabricated, and the longitudinal and transverse structural parameters of the device and the geometrical parameters of the integrated InP lens were simulated and optimized.With the device bandwidth of 1.0GHz, Multiplexing, optical interconnection and optical computing networks have important application value.