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本文介绍了熔凝锌系玻璃钝化硅低频高压功率器件的工艺方法.对所研制的器件进行了几项可靠性试验,取得了满意的结果.
In this paper, the technological process of fused-zinc passivated silicon passivation silicon low-frequency high-voltage power devices is introduced.Several reliability tests have been carried out on the devices developed, and satisfactory results have been obtained.