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介绍一种分光路二维剪切干涉光电检测系统。该系统实现了两正交方向 (二维 )同时进行检测与计算机自动化数据处理 ;采用了一系列消噪声措施和两图像相减等技术 ,使得波前重构中能较好地采用简单的数值积分方法 ;并得到了在± 10 μm的测量范围内 ,方差不超过 0 .2 57μm和0 .0 5μm的灵敏度。利用该系统成功地对强激光腔镜变形过程实现了动态检测
A spectrophotometric two-dimensional shear interference photoelectric detection system is introduced. The system realizes two orthogonal directions (two-dimensional) simultaneous detection and computer automated data processing; adopts a series of de-noising measures and two image subtraction techniques to make the wavefront reconstruction can better use simple numerical Integral method; and has been within the ± 10 μm measurement range, the variance does not exceed 0. 257μm and 0. 05μm sensitivity. The system is used to successfully detect the deformation of the laser mirror