设计了一种新型的光纤布拉格光栅(FBG)微位移传感器。基于杠杆原理,通过自由设计不同的力臂长度满足各种测量要求,可以在不损毁光栅的情况下使光栅产生更加显著的应变;其封装不会产生啁啾,可以通过结构的级联实现传感器的复用进行多维多参量的测量。实验结果证明,在微测量范围0.00-0.20 mm内,该微位移传感器的灵敏度达到12.5 nm/mm,较其它梁臂或聚合物封装结构的传感器有很大提高。 A novel fiber Bragg grating (FBG) micro-displacement sensor is designed. Based on the principle of leverage, the grating can be more significantly strained by freely designing different arm lengths to meet various measurement requirements without chipping the package; there is no chirp in the package and the sensor can be implemented through a cascade of structures The multiplexing of multi-dimensional multi-parameter measurement. The experimental results show that the sensitivity of the micro-displacement sensor reaches 12.5 nm / mm within the micro-measurement range of 0.00-0.20 mm, which is much higher than that of other beam-arm or polymer-encapsulated sensors.