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正切规则已经给出了蒸发角和蒸镀膜的微柱体结构的生长方向的关系。根据正切规 则和蒸发源与基片的相对几何三角关系，本文针对四种通用类型的夹具，给出了薄膜微 柱体结构均匀性的理论分布公式，计算了不同情况下结构均匀性的理论分布曲线。同 时，分析和讨论了薄膜的结构模型，并且得到并证实了在旋转球面夹具下获得的薄膜的 结构是最佳的结论。
The tangent rule has given the relationship between the evaporation angle and the growth direction of the micro-columnar structure of the deposited film. According to the tangent rule and the relative geometric trigonometric relationship between the evaporation source and the substrate, the theoretical distribution formulas of structural uniformity of thin-film micro-cylinders are given for the four common types of fixtures. The theoretical distribution of structural uniformity under different conditions is calculated curve. At the same time, the structural model of the film is analyzed and discussed, and the conclusion is drawn that the structure of the film obtained under the rotating spherical fixture is the best.