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分别设计制备了基于石英衬底和硅衬底的16通道200GHz二氧化硅可调复用器/解复用器。该器件由一个16通道200GHz的阵列波导光栅(AWG)和Mach-Zehnder干涉型热光可调光衰减器(VOA)阵列构成。在衰减量达到20dB的时候,基于石英衬底的器件的外加偏压和功耗分别是11.7V和110mW;而基于硅衬底的器件的外加偏压和功耗分别是22V和380mW。分析了基于不同衬底的器件性能出现差别的原因,并设计了新的结构,提高了器件性能。
A 16-channel 200GHz silicon dioxide tunable multiplexer / demultiplexer based on a quartz substrate and a silicon substrate is respectively designed and prepared. The device consists of a 16-channel 200GHz arrayed waveguide grating (AWG) and a Mach-Zehnder interferometric thermo-optic dimmable attenuator (VOA) array. The bias and power dissipation of quartz-based devices were 11.7V and 110mW, respectively, at 20dB attenuation; whereas the bias and power dissipation of silicon-based devices were 22V and 380mW, respectively. The reasons for the difference of device performance based on different substrates are analyzed, and a new structure is designed to improve the device performance.