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用俄歇电子能谱仪测量在低的入射电子能量下二次电子弹性峰附近的损失结构,得到了电子能量损失谱。对于铝、三氧化二铝、铝表面吸附氧以及铝表面复盖薄氧化层的样品,其能量损失谱有明显的差别,主要是等离子损失峰的位置和强度的变化。纯铝的表面和体等离子损失能量为10.5eV和15.5eV,三氧化二铝的等离子损失峰位置移到12eV和21.5eV处;铝表面复盖薄氧化层时,其损失谱是铝和三氧化二铝损失谱的混合:铝表面吸附少量氧时,表面和体等离子损失峰的强度明显减弱,并出现与氧相联系的8eV损失峰。文中给出了不同入射电子能量下这些损失谱的变化,从中可以区分来自表面和体内的损失机理,同时对铝表面复盖薄氧化层的样品,提供了一个测量其氧化层厚度的方法。
The loss structure near the secondary electron elastic peak at low incident electron energy was measured by Auger electron spectroscopy, and the electron energy loss spectrum was obtained. The energy loss spectra of aluminum, aluminum oxide, adsorbed oxygen on the aluminum surface and thin oxide layer on the aluminum surface have obvious differences, mainly the change of the position and intensity of the plasma loss peak. Pure aluminum surface and body plasma loss energy of 10.5eV and 15.5eV, the peak position of aluminum oxide plasma loss shifted 12eV and 21.5eV; aluminum surface covered with a thin oxide layer, the loss spectrum of aluminum and trioxide Mixing of two aluminum loss spectra: When a small amount of oxygen is adsorbed on the aluminum surface, the intensity of the peak of the plasma loss on the surface and the bulk body is significantly weakened, and a peak of 8 eV associated with the oxygen appears. The changes of these loss spectra under different incident electron energies are given in this paper. The loss mechanism from the surface and the body can be distinguished from each other. Meanwhile, a method of measuring the thickness of the oxide layer on the aluminum surface is provided.