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本文研究了用~(75)A_s~+离子注入的Al_2O_3膜的抗腐蚀性。Al_2O_3膜在磷酸中的最小腐蚀速率(或最佳的~(75)A_s~+杂质浓度)能根据实验结果和类高斯离子射程分布得到。实验结果表明,注入离子的Al_2O_3膜在H_3PO_4—CrO_3溶液中的腐蚀率要比未注入的Al_2O_3膜在相同条件下的腐蚀速率小10倍以上。因此,甚至在酸中,离子注入在改善材料表面层的抗腐蚀性方面也是有希望的技术。
In this paper, the corrosion resistance of Al 2 O 3 films implanted with ~ (75) A_s ~ + ions was studied. The minimum corrosion rate of Al 2 O 3 film in phosphoric acid (or the best concentration of ~ (75) A_s ~ +) can be obtained based on the experimental results and the distribution of quasi-Gaussian ion. The experimental results show that the corrosion rate of Al_2O_3 implanted ions in H_3PO_4-CrO_3 solution is more than 10 times lower than the corrosion rate of Al_2O_3 without implanted ions under the same conditions. Therefore, ion implantation is a promising technique even in acids to improve the corrosion resistance of the material surface layer.